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NIKON METROLOGY Nikon Metrolgy Nexiv Vmz-Nwl200 Video Measuring System

Code VMZ-NWL200

VMZ-NWL200 is an automatic wafer measuring system that integrates a video measuring system “NEXIV” and a wafer loader “NWL200”. NEXIV, which has advanced image processing technology, automatically performs high-speed, high-precision measurement of 6-inch or 8-inch wafers held in a carrier.

Additional Info

The NEXIV video measurement system, used extensively in the global semiconductor industry, has been integrated with Nikon’s proven NWL200 automatic wafer loading system.

The result is the VMZ-NWL200, an innovative measuring cell with excellent reliability and efficiency. In addition, specially developed software simplifies complex operations required for process control. High quality data is fed back faster to the production line, maximising yield.

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DeviceVideo Measuring System:NEXIV(VMZ-S3020 Type2?Type3?TypeTZ)
Loader:NWL200
Wafer *1size:6,8inch(SEMI/JEIDA Standard)
Compatible carrier6inch:PA182-60MB-06XX(Entegris)
8inch:PA192-80M-06XX(Entegris)
Throughput *26 min 45 sec
Minimum L/S500 line/mm
Operating environment temperature19~26?
Operating environment humidityLess than 70%RH
Dimensions4125 x 3040 mm
Power source voltageAC100-120V/200-240V
Power source frequency50Hz/60Hz
Current consumption7.5A/3.7A
Vacuum-80kPa

*1 Require wafer transfer evaluation before sales
*2 Transfer time for 25 wafers excluding measurement time

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