Skip to content

NIKON METROLOGY Nexiv Vmf-K3040 Video Measuring System

Code VMF-K3040

Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Its advanced confocal system boosts throughput for diverse samples, supporting miniaturisation in semiconductor and precision engineering industries.

Additional Info

NIKON METROLOGY NEXIV VMF-K3040 Video Measuring System


The NEXIV VMF-K Series combines 2D and 3D optical measurements with 1.5 times higher throughput for probe cards. It has a 45x objective lens and LED confocal light source (30,000-hour lifespan) and supports wafer-level packaging and long-dimension measurements. SEMI S2/S8 compliant, it excels in semiconductor and precision engineering applications.

Downloads
Back to results page
Click to view complete product details
VMF-K3040 / VMF-K6555 / VMF-K6561
Measuring headStandard head (Type-S)High-magnification head (Type-H)45× High-magnification head
Optical magnificationMagnification1.5×3.0×7.5×15×30×45×
Working distance24 mm24 mm5 mm20 mm5 mm5 mm
Confocal optics (height measurement)Maximum scan height1 mm
Field of view7.80×5.82
mm		3.90×2.91
mm		1.56×1.17
mm		0.78×0.58
mm		0.39×0.29
mm		0.26×0.19
mm
Height measurement repeatability (2s)0.6 µm0.35 µm0.25 µm0.25 µm0.2 µm0.2 µm
Height resolution0.025 µm0.01 µm
Light sourceGreen LED
Bright Field Optics (two-dimensional measurement)Magnification methodMotorised 5-step zoom
Field of view7.81×5.86~
0.52×0.39 mm		3.91×2.93~
0.26×0.20 mm		1.56×1.17~
0.10×0.078 mm		1.27×0.95~
0.099×0.074 mm		0.63×0.47~
0.049×0.037 mm		0.63×0.47~
0.049×0.037 mm
IlluminationDiascopic, coaxial episcopic and ringDiascopic, coaxial episcopic
Light sourceWhite LED
AutofocusTTL Laser AF, Image AF
Main bodyPower sourceAC 100V-240V ±10%, 50/60 Hz
Power consumption5.5A-3A
Safety standardSEMI S2/S8 compliance *1


ModelVMF-K3040
Main BodyXYZ strokes300×400×150 mm
Accuracy guaranteed loading capacity20 kg
Maximum permissible error (L: Length in mm)EUX,MPE EUY,MPE 1.2 + 4L/1000 µm
EUXY,MPE 2.0 + 4L/1000 µm
EUZ,MPE 1 + L/1000 µm
Minimum readout0.01 µm
Dimensions (WxDxH) and weightMain body and table1146×1247×1973 mm / approx. 800 kg
Controller190×450×440 mm / approx. 14 kg
Recommended installation dimensions (WxD) *23150×3000 mm
Minimum installation dimensions (WxD)2500×1600 mm

*1: If installed according to SEMI guidelines, VMF-K will be compliant with SEMI S2/S8.
*2: Includes our recommended maintenance space.

Close

POP-IN HTML goes here

Close

Your Basket

Your basket is currently empty