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Nikon Metrology Nexiv Vmf-K6555 Video Measuring System

NIKON METROLOGY Nexiv Vmf-K6555 Video Measuring System

New

Code VMF-K6555

Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Its advanced confocal system boosts throughput for diverse samples, supporting miniaturisation in semiconductor and precision engineering industries.

Additional Info

The NEXIV VMF-K Series combines 2D and 3D optical measurements with 1.5 times higher throughput for probe cards. It has a 45x objective lens and LED confocal light source (30,000-hour lifespan) and supports wafer-level packaging and long-dimension measurements. SEMI S2/S8 compliant, it excels in semiconductor and precision engineering applications.

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nexiv-vmf-k-series-en-1.pdf (3 MB)

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VMF-K3040 / VMF-K6555 / VMF-K6561
Measuring head		Standard head (Type-S)			High-magnification head (Type-H)		45× High-magnification head
Optical magnification	Magnification	1.5×	3.0×	7.5×	15×	30×	45×
Optical magnification	Working distance	24 mm	24 mm	5 mm	20 mm	5 mm	5 mm
Confocal optics (height measurement)	Maximum scan height	1 mm
	Field of view	7.80×5.82 mm	3.90×2.91 mm	1.56×1.17 mm	0.78×0.58 mm	0.39×0.29 mm	0.26×0.19 mm
	Height measurement repeatability (2s)	0.6 µm	0.35 µm	0.25 µm	0.25 µm	0.2 µm	0.2 µm
	Height resolution	0.025 µm	0.01 µm
	Light source	Green LED
Bright Field Optics (two-dimensional measurement)	Magnification method	Motorised 5-step zoom
	Field of view	7.81×5.86~ 0.52×0.39 mm	3.91×2.93~ 0.26×0.20 mm	1.56×1.17~ 0.10×0.078 mm	1.27×0.95~ 0.099×0.074 mm	0.63×0.47~ 0.049×0.037 mm	0.63×0.47~ 0.049×0.037 mm
	Illumination	Diascopic, coaxial episcopic and ring				Diascopic, coaxial episcopic
	Light source	White LED
	Autofocus	TTL Laser AF, Image AF
Main body	Power source	AC 100V-240V ±10%, 50/60 Hz
	Power consumption	5.5A-3A
	Safety standard	SEMI S2/S8 compliance *^1**

Model		VMF-K6555
Main Body	XYZ strokes	650×550×150 mm
	Accuracy guaranteed loading capacity	30 kg
	Maximum permissible error (L: Length in mm)	E_UX,MPE E_UY,MPE 1.2 + 4L/1000 µm
		E_UXY,MPE 2.0 + 4L/1000 µm
		E_UZ,MPE 1 + L/1000 µm
	Minimum readout	0.01 µm
Dimensions (WxDxH) and weight	Main body and table	1198×1640×1973 mm / approx. 800 kg
	Controller	190×450×440 mm / approx. 14 kg
	*Recommended installation dimensions (WxD) ^2**	3200×3300 mm
	Minimum installation dimensions (WxD)	2500×1900 mm

*1: If installed according to SEMI guidelines, VMF-K will be compliant with SEMI S2/S8.
*2: Includes our recommended maintenance space.

nexiv-vmf-k-series-en-1.pdf (3 MB)

NIKON METROLOGY Nexiv Vmf-K6555 Video Measuring System

New

Code VMF-K6555

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