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NIKON METROLOGY Nexiv Vmf-K6555 Video Measuring System

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Code VMF-K6555

Nikon’s NEXIV VMF-K Series transforms optical measurement, combining high-speed 2D and 3D capabilities with exceptional accuracy. Its advanced confocal system boosts throughput for diverse samples, supporting miniaturisation in semiconductor and precision engineering industries.

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The NEXIV VMF-K Series combines 2D and 3D optical measurements with 1.5 times higher throughput for probe cards. It has a 45x objective lens and LED confocal light source (30,000-hour lifespan) and supports wafer-level packaging and long-dimension measurements. SEMI S2/S8 compliant, it excels in semiconductor and precision engineering applications.

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VMF-K3040 / VMF-K6555 / VMF-K6561
Measuring headStandard head (Type-S)High-magnification head (Type-H)45× High-magnification head
Optical magnificationMagnification1.5×3.0×7.5×15×30×45×
Working distance24 mm24 mm5 mm20 mm5 mm5 mm
Confocal optics (height measurement)Maximum scan height1 mm
Field of view7.80×5.82
mm		3.90×2.91
mm		1.56×1.17
mm		0.78×0.58
mm		0.39×0.29
mm		0.26×0.19
mm
Height measurement repeatability (2s)0.6 µm0.35 µm0.25 µm0.25 µm0.2 µm0.2 µm
Height resolution0.025 µm0.01 µm
Light sourceGreen LED
Bright Field Optics (two-dimensional measurement)Magnification methodMotorised 5-step zoom
Field of view7.81×5.86~
0.52×0.39 mm		3.91×2.93~
0.26×0.20 mm		1.56×1.17~
0.10×0.078 mm		1.27×0.95~
0.099×0.074 mm		0.63×0.47~
0.049×0.037 mm		0.63×0.47~
0.049×0.037 mm
IlluminationDiascopic, coaxial episcopic and ringDiascopic, coaxial episcopic
Light sourceWhite LED
AutofocusTTL Laser AF, Image AF
Main bodyPower sourceAC 100V-240V ±10%, 50/60 Hz
Power consumption5.5A-3A
Safety standardSEMI S2/S8 compliance *1


ModelVMF-K6555
Main BodyXYZ strokes650×550×150 mm
Accuracy guaranteed loading capacity30 kg
Maximum permissible error (L: Length in mm)EUX,MPE EUY,MPE 1.2 + 4L/1000 µm
EUXY,MPE 2.0 + 4L/1000 µm
EUZ,MPE 1 + L/1000 µm
Minimum readout0.01 µm
Dimensions (WxDxH) and weightMain body and table1198×1640×1973 mm / approx. 800 kg
Controller190×450×440 mm / approx. 14 kg
Recommended installation dimensions (WxD) *23200×3300 mm
Minimum installation dimensions (WxD)2500×1900 mm

*1: If installed according to SEMI guidelines, VMF-K will be compliant with SEMI S2/S8.
*2: Includes our recommended maintenance space.

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